Starting a new Lecture Notes Series on VLSI Technology
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VLSI Technology By Lecture Notes together!
Lecture 2: L 2 VLSI | How VLSI Industry Makes Profit ?
Lecture 3: L 3 VLSI | Clean Room and It's Protocols
Lecture 5: L 5 VLSI | Introduction to Semiconductor
Lecture 6: L 6 VLSI | Basic Devices in Electronics Resistor, Capacitor, Diode, Bipolar Junction Transistor BJT
Lecture 8: L 8 VLSI | BJT & CMOS Fabrication Process
Lecture 9: L 9 VLSI | Dominance of Silicon | Wafer Orientation and Defects | Miller Indices & Schottky Defects
Lecture 14: L 14 VLSI | Silicon Shaping Complete
Lecture 15: L 15 VLSI | Wafer Cleaning | RCA Cleaning
Lecture 17: Vapour Phase Epitaxy | VLSI Technology
Lecture 18: Epitaxy : Detailed Analysis | VLSI Technology
Lecture 19: Molecular Beam Epitaxy | VLSI Technology
Lecture 20: Defects in Epitaxial Later | VLSI Technology
Lecture 21: Epitaxial Evaluation | VLSI Technology
Lecture 22: Silicon on Insulator | VLSI Technology
Lecture 23: Thermal Process | Types of Thermal Process
Lecture 24: Oxidation - Introduction | Oxidation
Lecture 25: Pre Oxidation Cleaning | Oxidation
Lecture 26: Deal and Grove Model | Oxidation
Lecture 27: Oxidation Rate | Oxidations
Lecture 28: Oxidation Process | Oxidation
Lecture 29: RTO | Rapid Thermal Oxidation | Oxidation
Lecture 30: Oxidation Measurements | Oxidation
Lecture 31: Photolithography Introduction | Photolithography
Lecture 32: Types of Photolithography | Photolithography
Lecture 33: Photolithography Process | Photography
Lecture 34: Alignment and Exposure | Photolithography
Lecture 35: After Alignment and Exposure | Photolithography
Lecture 37: Optical Lithography | Photolithography
Lecture 39: Diffusion Introduction | Diffusion
Lecture 40: Diffusion Process | Diffusion
Lecture 41: Fick's Laws | Fick's 1-D Equation | Diffusion
Lecture 42: Diffusion Profile | Diffusion
Lecture 43: Dopants and Diffusion Furnace | Diffusion
Lecture 44: Solid, Liquid and Gaseous Sources | Diffusion
Lecture 45: Annealing Introduction | Annealing
Lecture 46: Thermal Process | Application of Thermal Process
Lecture 47: RTP I Rapid Thermal Process | Thermal Process
Lecture 48: Plasma Introduction | Plasma
Lecture 49: Plasma Ion Bombardment | Plasma
Lecture 50: Application of Plasma - PECVD | Plasma
Lecture 51: Application of Plasma | Plasma Etching | Plasma
Lecture 52: ICP & ECR | Application of Plasma- 3 | Plasma
Lecture 54: Stopping Mechanism | Ion Implantation
Lecture 56: Ion Implantation Hardware | Ion Implantation
Lecture 57: Ion Implantation Measurements | Ion Implantation
Lecture 60: Wet Etching - 1 | Etching in VLSI Fabrication
Lecture 61: Wet Etching - 2 | Etching in VLSI Fabrication
Lecture 62: Plasma Etching | Etching in VLSI Fabrication
Lecture 68: Etching Conclusion | Etching in VLSI Fabrication
Lecture 70: CVD Processes | Chemical Vapour Deposition
Lecture 71: Step Coverage 1 | Chemical Vapour Deposition
Lecture 72: Step Coverage 2 | Chemical Vapour Deposition
Lecture 73: Deposition Regime | Chemical Vapour Deposition
Lecture 74: CVD Applications | Chemical Vapour Deposition
Lecture 82: Conducting Thin Films Continued | Metallization
Lecture 83: Metal Thin Film Characteristics | Metallization
Lecture 84: CVD Chemical Vapour Deposition | Metallization
Lecture 85: PVD Physical Vapour Deposition | Metallization
Lecture 87: Copper Metallization | Metallization
Lecture 88: CMP Introduction | Chemical Mechanical Polishing
Lecture 89: CMP Necessity Advantages and Applications
Lecture 90: CMP Hardware | Chemical Mechanical Polishing
Lecture 92: CMP Basics | Chemical Mechanical Polishing
Lecture 93: CMP Processes | Chemical Mechanical Polishing
Lecture 101: Interconnection Formation in Process Integration
Lecture 103: CMOS Process - 1980's Technology | CMOS Process
Lecture 104: CMOS Process - 1990's Technology | CMOS Process
Lecture 105: CMOS Process - 2000's Technology | CMOS Process
Lecture 108: Future Trends in VLSI | Future of VLSI Technology